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Ilion II System, Model 697
Ilion II System, Model 697
Product Overview
Technical Specifications
Product Advantages
Product Applications
Product Overview
The Ilion® II broad beam argon milling system is a tabletop tool for producing cross-sections and planar polishing of samples for examination in the scanning electron microscope (SEM) and other instruments. Each Ilion II system is suitable for polishing a wide range of materials, including samples made from multiple elements and alloys with a wide range of mechanical hardness, size and other physical characteristics.
The instrument incorporates the WhisperLok® system for sample exchange and an optional temperature-controlled liquid nitrogen cooling stage.
The Ilion II system incorporates a 10” touch screen computer for ease of use and to increase control and reproducibility of the polishing process. A digital zoom microscope monitors the polishing process in real-time, and the color images can be stored in the DigitalMicrograph® (DM) software for review and analysis while the sample is in the SEM.
Technical Specifications
| Item | Technical Specification |
| Ion Source | |
| Ion guns | Two Penning ion guns with rare-earth magnets |
| Milling angle (°) | +10 to -10 (each gun independently adjustable) |
| Ion beam energy (kV) | 0.1 – 8.0 |
| Peak ion current density (A/cm²) | 10 |
| Milling rate on silicon (µm/h) | 300 (at 8.0 kV) |
| Beam diameter | Adjustable via gas flow controller or discharge voltage |
| Beam modulation | Single or double modulation (adjustable or off) |
| Specimen Stage | |
| Sample size (mm) | 10 × 10 × 4 |
| Mounting | Ilion patented blade |
| Rotation (rpm) | 0.5 – 6.0 |
| Viewing | Digital zoom microscope |
| Vacuum System | |
| Pumping configuration | Two-stage diaphragm pump backing an 80 L/s turbo drag pump |
| Base pressure (torr) | 5 × 10⁻⁶ |
| Operating pressure (torr) | 8 × 10⁻⁵ |
| Vacuum gauge | Cold cathode (main chamber); solid-state (backing pump) |
| Specimen airlock | WhisperLok; exchange time < 1 min |
| User Interface | 10” color touchscreen with complete parameter control & recipe operation |
| Dimensions & Utilities | |
| Overall size (mm) | 575 × 495 × 615 |
| Shipping weight (kg) | 45 |
| Power consumption (W) | 200 during operation; 100 with guns off |
| Power requirements | Universal 100/240 VAC, 50/60 Hz |
| Argon gas (psi) | 25 |
Product Advantages
• Vacuum load-lock and liquid nitrogen cold stage to provide rapid workflows on beam sensitive samples
• Real-time observation of the polishing process including an optical microscope with digital imaging; images can be stored and analyzed with DigitalMicrograph® software from Gatan
• Repeatable results from recipes and operation of the Ilion® II via a 10" color touch screen interface
• Damage-free surfaces for analytical techniques, such as cathodoluminescence and EBSD, where the signal is generated near the surface
Product Applications
• Surface-sensitive techniques support such as cathodoluminescence and EBSD, preserving surface integrity
• Real-time process monitoring with integrated optical microscope and DigitalMicrograph® for image capture and analysis
• Fast workflow for beam-sensitive specimens using vacuum load-lock and liquid nitrogen cooling stage
• Repeatable sample prep through recipe-based protocols and touchscreen interface
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